VSM72 – Smartline™ Vacuum Transducer

Absolute Pressure 1000 mbar to 5 x 10-9 mbar (=hPa), 750 Torr to 5 x 10-9 Torr

The compact VSM72 Pirani/cold cathode combination transducer measures absolute pressure from atmosphere to ultrahigh vacuum.

The intelligent, micro processor driven Smartline transducers automatically control the appropriate interaction of both vacuum sensors regarding measurement ranges and switching points to achieve high accuracy.

Benefits

• Combination sensor with wide measuring range
• Patented pulsed Pirani sensor with extended range allows operation of the cold cathode at lower pressure and increase of lifetime
• Robust cold cathode sensor, insensitive against inrush of air
• Logarithmic signal output 0 – 10 V and RS485 interface
• Replaceable sensor head
• Excellent ignition behavior
• Correct pressure readings by means of separate gas type correction factors for Pirani and cold cathode sensors
• Two independent, dry relay switch points

Typical Applications

• Analysis instruments
• Coating plants and vapor deposition
• Mass spectrometry
• Process engineering
• Sputtering plants
• Vacuum furnaces